Characterization of ZnO Thin Films Grown on c-Sapphire by Pulsed Laser Deposition as Templates for Regrowth of ZnO by Metal Organic Chemical Vapor Deposition
نویسندگان
چکیده
The use of ZnO template layers grown Pulsed Laser Deposition (PLD) has been seen to produce dramatic improvements in the surface morphology, crystallographic quality and optical properties of ZnO layers grown on c-sapphire substrates by Metal Organic Chemical Vapor Deposition. This paper provides complementary details on the PLD-grown ZnO template properties.
منابع مشابه
Metal organic chemical vapor deposition and investigation of ZnO thin films grown on sapphire
A new type of large area metal organic chemical vapor deposition (MOCVD) system for the growth of high quality and large size ZnO materials is introduced. Materials properties of the un-doped, nand p-doped ZnO epi-films grown on sapphire substrates by this MOCVD system are studied by various techniques, including high resolution X-ray diffraction (XRD), UV–Visible optical transmission (OT), pho...
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